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Publications |
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" Electronic
Structure of Carbon freee silicon oxynitride films grown using
an organic precursor hexamethyl disilazane" S. K. Nema,
P. Kikani, A. Chainani and P. I. John J. Phys. D: Appl.
Phys. 35
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" Plasma polymerization using constricted anode plasma source" S.K.Nema, P.M.Raole,
S.Mukherjee, P. Kikani and P. I. John, Surface coatings &
technologies
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"Temperature
Dependence
of
CFx
Functional
Groups
in
Polymer
Deposited
using Radio Frequency Plasma" S. K. Nema, P. M. Raole, P.
Kikani and P. I. John
in National Symposium on Plasma Physics,Coimbatore, 2002
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"PECVD of high quality carbon-free silicon oxy-nitride films
using an organic precursor"
P. Kikani,
C. Jariwala, A. Chainani and P. I. John,
Power Beams and Material Processing PBAMP-2002, Mumbai.
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